Product news
In-situ monitoring for Semiconductor Fab Chemicals
Techmation b.v.
2010-06-04
Techmation specialises in the in-line concentration measurement of liquids, such as the wet chemicals used in the fabrication of silicon wafers. With the K-Patents technology we offer over 30 years of experience in supplying digital process refractometers for thousands of industrial applications around the world.
The new model PR-33-S semicon refractometer monitors real-time the chemical concentrations and provides immediate feedback if the chemical is out of specifications. K-Patents refractometer can be used in the bulk chemical delivery systems in the subfab and in the point-of-use chemical blending and spiking applications in the cleanroom.
Refractometer uses the Refractive Index nD-priniciple. The benefit of that principle is that one sensor can detect all chemicals. Every chemical is unique in terms of the physical property of Refractive Index. For multi-component solutions the instrument provides a chemical checksum.
The Semicon Process Refractometer PR-33-S is designed for cleanroom environments. The PR-33-S system consists of a PTFE Teflon sensor, an Ethernet FEP (Fluorinated Ethylene-propylene) cable, and a PoE (Power-over-Ethernet) switch that transmits power to the sensor and data to a computer. A 4-20 mA output unit is available as an option.
please contact:
Huibert Versluis
www.techmation.com
